Our products are relied on in many different applications around the world. Therefore, we provide solutions, service and support which are tailored to meet your processing needs and expectations. We offer a comprehensive maintenance plan and spare parts matrix which is designed to keep your equipment effective and productive. Our systems use the most reliable parts and technologies to provide the most reliable performance. With the same intent, our Service and Support team is ready to accurately assess and support your service and parts needs.

Such support includes:

  • Providing correct and accurate service in timely manner
  • Service, Repair, and Retrofits
  • Service Contracts
  • Spare Parts Kits
  • Training

Field Service
Advanced Vacuum offers on-site service for troubleshooting, preventive maintenance and upgrade installations. Our team members are routinely trained with the latest products and configurations to provide a base of expertise. We introduce a CIP (Continuous Improvement Program) regimen to your system’s application to enhance its reliability and productivity through strong communication of recommended upgrades, PM (Preventive Maintenance) schedules and system optimizations.

Part Returns/Replacement
In the event an Advanced Vacuum system is down, the clock is ticking and our goal is to get your system back up and running in the timeliest manner possible. Our recommended spare parts kits are designed to keep predetermined process consumables on hand for quick response while managing an effective cost of ownership. Advanced Vacuum, leveraging Plasma-Therm’s infrastructure,  has a global warehouse network setup to minimize down time due to parts availability.

Other Online Support

  • Product and process inquiries: Submit a case
  • System Documentation
  • OEM Data Sheets and Manuals
  • Material Safety Data Sheets
  • Available Upgrades


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